Dai, Rongwang
Liu, Yun
Wang, Ziwen
Li, Minghao
Wei, Tao
Xue, Zhongying https://orcid.org/0000-0003-2898-1472
Wei, Xing https://orcid.org/0000-0002-5316-0011
Funding for this research was provided by:
National Natural Science Foundation of China (62074152)
Key R&D Program of China (2022YFB4401700)
Article Title: Study on the fundamental factors of the property evolution of a 300 mm polycrystalline trap-rich layer
Journal Title: Semiconductor Science and Technology
Article Type: paper
Copyright Information: © 2023 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-02-05
Date Accepted: 2023-06-13
Online publication date: 2023-07-21