Baek, Jaekeun https://orcid.org/0009-0001-1549-5806
An, Surin https://orcid.org/0000-0001-7582-6147
Park, Ahhyun
Kim, Ki-Yeon https://orcid.org/0000-0002-0672-2915
Hong, Sang Jeen https://orcid.org/0000-0002-6576-690X
Funding for this research was provided by:
Korea Evaluation Institute of Industrial Technology (K_G012001079803)
Article Title: Characterization of PECVD Si3N4 thin film in multiple oxide–nitride stack for 3D-NAND flash memory
Journal Title: Semiconductor Science and Technology
Article Type: paper
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Publication dates
Date Received: 2023-05-19
Date Accepted: 2023-10-17
Online publication date: 2023-10-31