Luo, Yuchi
Yuan, Ye https://orcid.org/0000-0002-3810-373X
Liang, Zhiwen
Cai, Tianren
Yin, Hengyi
Zhao, Yichen
Zhang, Hongmeng
Cao, Jiakang
Wan, Wenting
Ji, Yanda https://orcid.org/0000-0001-9979-6982
Yang, Anli
Wang, Qi https://orcid.org/0000-0001-7129-1974
Hao, Mingming
Funding for this research was provided by:
National Natural Science Foundation of China (52273271)
Guangdong Province Key-Area Research and Development Program (2020B090922001)
National Key Research and Development Program of China (2021YFA0716400)
Article Title: Improving the structural performance of low-temperature sputtered AlN on silicon substrate
Journal Title: Semiconductor Science and Technology
Article Type: paper
Copyright Information: © 2024 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-09-10
Date Accepted: 2024-02-01
Online publication date: 2024-02-13