Wang, Tong-Wen https://orcid.org/0000-0003-1705-8930
Sharma, Mukta
Tsai, Chia-Lung https://orcid.org/0000-0002-2739-6952
Zhang, Jin-Rong
Funding for this research was provided by:
National Science and Technology Council (NSTC 113-2221-E-182-035)
Ministry of Science and Technology (MOST 110-2221E-182-056-MY2.)
Article Title: Metal–semiconductor–metal photodiode fabricated with an AlGaN/AlN superlattice for UV light detection
Journal Title: Semiconductor Science and Technology
Article Type: paper
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Publication dates
Date Received: 2024-09-19
Date Accepted: 2025-01-13
Online publication date: 2025-02-12