Kong, Moufu https://orcid.org/0000-0003-2964-7652
Yang, Mingliang
Deng, Hongfei
Cheng, Zeyu
Ai, Zhaoyu
Yi, Bo https://orcid.org/0000-0002-6596-8480
Yang, Hongqiang
Zhang, Bingke https://orcid.org/0000-0002-0980-9645
Funding for this research was provided by:
Central Guiding Local Science and Technology Development Special Project of Sichuan (2024ZYD0310)
Key R & D project of science and technology plan of Sichuan province (2023YFG0005)
Article Title: A novel lateral superjunction Ga2O3 MOSFET with a self-biased accumulation layer for ultra-low specific on-resistance and improved FOM
Journal Title: Semiconductor Science and Technology
Article Type: paper
Copyright Information: © 2025 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2025-01-12
Date Accepted: 2025-03-18
Online publication date: 2025-03-27