Sun, Zhibin
Wang, Ying https://orcid.org/0000-0003-0790-8153
Song, Yanxing
Cao, Fei
Zhang, Wei
Qin, Feisong
Funding for this research was provided by:
National R&D Program for Major Research Instruments of China (62027814)
Basic Research Development Program of Liaoning Province of China (2022JH2/101300266)
Article Title: TCAD analysis of SiC trench MOSFET structures with improved frequency figure of merit
Journal Title: Semiconductor Science and Technology
Article Type: paper
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Publication dates
Date Received: 2025-05-15
Date Accepted: 2025-08-19
Online publication date: 2025-09-05