Hasan, Md Mahmudul https://orcid.org/0009-0005-1810-3010
Rahman, Faiz https://orcid.org/0000-0001-7224-888X
Article Title: Deep cavity etching in silicon for hybrid planar integration of silicon with other semiconductors
Journal Title: Semiconductor Science and Technology
Article Type: paper
Copyright Information: © 2026 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2025-08-17
Date Accepted: 2026-01-19
Online publication date: 2026-01-30