Funding for this research was provided by:
National Natural Science Foundation of China (51622502)
Fok Ying Tung Education Foundation (151053)
Foundation for the Author of National Excellent Doctoral Dissertation of China (201428)
Foundation for Innovative Research Groups of the National Natural Science Foundation of China (51521003)
Article Title: Design and fabrication of a high-speed linear piezoelectric actuator with nanometer resolution using a cantilever transducer
Journal Title: Smart Materials and Structures
Article Type: paper
Copyright Information: © 2019 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2018-11-25
Date Accepted: 2019-03-20
Online publication date: 2019-04-23