Zhang, Qiaozhen https://orcid.org/0000-0002-6180-6441
Zhao, Xiangyong
Wang, Feifei
Luo, Yang
Mao, Hongwei
Han, Tao
Funding for this research was provided by:
National Natural Science Youth Foundation of China (Grant No. 11904233)
Science and Technology Commission of Shanghai Municipality (Grant No. 19070502800)
National Natural Science Foundation of China (Grant No. 51772192)
Article Title: Surface acoustic wave pressure sensor on ScAlN/3C-SiC/Si layer structure incorporating biomimetic microcantilever: modelling and performance enhancement
Journal Title: Smart Materials and Structures
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-08-29
Date Accepted: 2020-11-16
Online publication date: 2020-12-09