Shibalov, M V https://orcid.org/0000-0002-5818-4776
Mumlyakov, A M https://orcid.org/0000-0002-1081-8338
Trofimov, I V
Timofeeva, E R
Sirotina, A P
Pershina, E A
Tagachenkov, A M
Anufriev, Y V
Zenova, E V
Porokhov, N V https://orcid.org/0000-0001-9911-5155
Tarkhov, M A
Funding for this research was provided by:
Ministry of Science and Higher Education of the Russian Federation (Grant № 0004-2019-0004)
Article Title: Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
Journal Title: Superconductor Science and Technology
Article Type: paper
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Publication dates
Date Received: 2021-04-02
Date Accepted: 2021-06-11
Online publication date: 2021-07-02