Wenskat, Marc https://orcid.org/0000-0001-6546-770X
Deyu, Getnet Kacha
González Díaz-Palacio, Isabel
Blick, Robert H https://orcid.org/0000-0002-3602-7702
Zierold, Robert
Hillert, Wolfgang
Funding for this research was provided by:
Bundesministerium für Bildung und Forschung (05K19GUB)
Article Title: Successful Al2O3 coating of superconducting niobium cavities with thermal ALD
Journal Title: Superconductor Science and Technology
Article Type: paper
Copyright Information: © 2022 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2022-07-28
Date Accepted: 2022-12-02
Online publication date: 2022-12-13