Kosutova, T https://orcid.org/0000-0002-1979-3181
Yao, Y
Fernandes, D
Zhang, Z https://orcid.org/0000-0003-4317-9701
Zhang, S-L https://orcid.org/0000-0003-2417-274X
Gustavo, F
Lefloch, F
Kubart, T https://orcid.org/0000-0003-2679-2387
Funding for this research was provided by:
European Union (101017733)
Swedish Governmental Agency for Innovation Systems (101017733)
Olle Engkvist Foundation (213-0276)
QuantERA II Program (101017733)
Swedish Foundation for Strategic Research (RIF14-0053)
Vetenskapsrådet (101007322)
Article Title: Ion-assisted sputter-deposition of superconducting NbN thin films on silicon
Journal Title: Superconductor Science and Technology
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2025-06-17
Date Accepted: 2025-09-01
Online publication date: 2025-09-17