Räcke, Paul https://orcid.org/0000-0002-1229-788X
Wunderlich, Ralf
Gerlach, Jürgen W
Meijer, Jan
Spemann, Daniel
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (Ulysses)
Bundesministerium für Bildung und Forschung (DiaquantFAB)
Sächsische Aufbaubank (100308873)
Leibniz-Gemeinschaft (SAW-2015-IOM-1)
European Union (ASTERIQS MICROSENS)
Article Title: Nanoscale ion implantation using focussed highly charged ions
Journal Title: New Journal of Physics
Article Type: paper
Copyright Information: © 2020 The Author(s). Published by IOP Publishing Ltd on behalf of the Institute of Physics and Deutsche Physikalische Gesellschaft
Publication dates
Date Received: 2020-04-17
Date Accepted: 2020-06-29
Online publication date: 2020-08-11