Soleimani, Behnam
Kolahdoozan, Mojtaba https://orcid.org/0000-0001-9059-1067
Salehi, Mehdi
Saadat, Mohammad
Vahabi, Meisam
Article Title: Experimental study of the effect of target composition and heat treatment on the Ag deposit on the adhesion of the surfaces used in microelectromechanical systems (MEMS)
Journal Title: Physica Scripta
Article Type: paper
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Publication dates
Date Received: 2023-06-10
Date Accepted: 2023-12-28
Online publication date: 2024-01-24