Barati, Hamed https://orcid.org/0000-0002-5061-441X
Barazandeh, Farshad
Jabari, Alireza https://orcid.org/0009-0002-3765-0368
Akbari, Mohammad https://orcid.org/0000-0002-5474-5548
Article Title: An innovative methodology for monitoring the sacrificial layer removal process in MEMS structures
Journal Title: Physica Scripta
Article Type: paper
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Publication dates
Date Received: 2023-09-07
Date Accepted: 2024-02-05
Online publication date: 2024-02-16