Qu, Yuanhang
Liu, Yan https://orcid.org/0000-0002-6251-7123
Wang, Shengxiang https://orcid.org/0000-0001-6698-790X
Zou, Yang
Guo, Shishang
Sun, Chengliang https://orcid.org/0000-0003-1986-2674
Funding for this research was provided by:
the National Natural Science Foundation of China (Grant No. 62201405)
Open Fund of Hubei Key Laboratory of Electronic Manufacturing and Packaging Integration (Grant No. EMPI2024011)
the National Key R&D Program of China (2023YFF0723000)
Article Title: Advanced AlN-based bulk acoustic wave filters on trap-rich/Si substrate
Journal Title: Physica Scripta
Article Type: paper
Copyright Information: © 2025 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2025-01-17
Date Accepted: 2025-03-20
Online publication date: 2025-04-01