Wang, Fang https://orcid.org/0000-0001-8459-435X
Funding for this research was provided by:
National Key Research and Development Program of China (2022YFF0607700)
Article Title: Compensation for the hysteresis nonlinearity displacement of the piezoelectric transducer in the phase shift interferometer
Journal Title: Physica Scripta
Article Type: paper
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Publication dates
Date Received: 2024-09-10
Date Accepted: 2025-04-07
Online publication date: 2025-04-22