Yusop, N https://orcid.org/0009-0006-2592-9395
Yusuf, Y
Samsudin, M E A
Ibrahim, N
Chanlek, N
Zainal, N https://orcid.org/0000-0003-1306-2828
Funding for this research was provided by:
Ministry of Higher Education, Malaysia (FRGS/1/2024/STG05/USM/02/5)
Article Title: Mechanism of aluminum nitride etching with variation of potassium hydroxide molarity
Journal Title: Physica Scripta
Article Type: paper
Copyright Information: © 2025 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2024-12-18
Date Accepted: 2025-06-02
Online publication date: 2025-06-16