Kim, Kyung Joong https://orcid.org/0000-0001-5559-9784
Kim, Tae Gun https://orcid.org/0000-0001-8754-7671
Kwon, Ji-Hwan
Ruh, Hyun
Park, Kyungsu
Min, Won Ja
Article Title: Traceable thickness measurement of ultra-thin HfO 2 films by medium-energy ion scattering spectroscopy
Journal Title: Metrologia
Article Type: paper
Copyright Information: © 2020 BIPM & IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-08-14
Date Accepted: 2019-11-14
Online publication date: 2020-02-12