Hirai, Akiko https://orcid.org/0000-0003-0198-8922
Bitou, Youichi https://orcid.org/0000-0002-5742-2779
Bae, Jaeseok https://orcid.org/0000-0001-7880-1586
Park, Jungjae https://orcid.org/0000-0002-1032-803X
Jin, Jonghan https://orcid.org/0000-0002-3511-4636
Funding for this research was provided by:
Korea Research Institute of Standards and Science (21011040)
Article Title: Precise measurement of the thickness of silicon wafers by double-sided interferometer and bilateral comparison
Journal Title: Metrologia
Article Type: paper
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Publication dates
Date Received: 2021-06-01
Date Accepted: 2021-08-17
Online publication date: 2021-09-16