Wu, Lixiang
Qiu, Keqiang
Liu, Ying
Fu, Shaojun
Funding for this research was provided by:
Knowledge Innovation Program of the Chinese Academy of Sciences (GY2011053005)
National Natural Science Foundation of China (11005111)
National Natural Science Foundation of China (11275201)
National Natural Science Foundation of China (11375175)
Journal title: Journal of Optics
Article type: paper
Article title: Algorithms for finely adjusting etch depths to improve the diffraction efficiency uniformity of large-aperture BSG
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-11-28
Date accepted: 2015-01-12
Online publication date: 2015-02-20