Wu, Lixiang
Qiu, Keqiang
Liu, Ying
Fu, Shaojun
Funding for this research was provided by:
Knowledge Innovation Program of the Chinese Academy of Sciences (GY2011053005)
National Natural Science Foundation of China (11005111, 11275201, 11375175)
Journal title: Journal of Optics
Article type: paper
Article title: Algorithms for finely adjusting etch depths to improve the diffraction efficiency uniformity of large-aperture BSG
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-11-28
Date accepted: 2015-01-12
Online publication date: 2015-02-20