Zhu, Jinlong
Jiang, Hao
Shi, Yating
Chen, Xiuguo
Zhang, Chuanwei
Liu, Shiyuan https://orcid.org/0000-0002-0756-1439
Funding for this research was provided by:
Program for Changjiang Scholars and Innovative Research Team in University of China (IRT13017)
Natural Science Foundation of Hubei Province of China (2015CFA005)
National Natural Science Foundation of China (51475191, 51525502, 51575214)
Journal title: Journal of Optics
Article type: paper
Article title: Improved nanostructure reconstruction by performing data refinement in optical scatterometry
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-07-07
Date accepted: 2015-11-03
Online publication date: 2015-12-11