Calaon, M
Madsen, M H
Weirich, J
Hansen, H N
Tosello, G
Hansen, P E
Garnaes, J
Tang, P T
Funding for this research was provided by:
The Danish Council for Strategic Research
Journal title: Surface Topography: Metrology and Properties
Article type: paper
Article title: Replication fidelity assessment of large area sub-μm structured polymer surfaces using scatterometry
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-05-11
Date accepted: 2015-08-17
Online publication date: 2015-09-15