Bodermann, B
Ehret, G
Endres, J
Wurm, M
Funding for this research was provided by:
EMRP (No 912/2009/EC)
Journal title: Surface Topography: Metrology and Properties
Article type: paper
Article title: Optical dimensional metrology at Physikalisch-Technische Bundesanstalt (PTB) on deep sub-wavelength nanostructured surfaces
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-01-08
Date accepted: 2016-04-12
Online publication date: 2016-05-18