Claus, Daniel http://orcid.org/0000-0002-0602-9715
Nizami, Moaaz Rauf
Funding for this research was provided by:
Bundesministerium für Bildung und Forschung (13N14180)
Article Title: Influence of aberrations and roughness on the chromatic confocal signal based on experiments and wave-optical modeling
Journal Title: Surface Topography: Metrology and Properties
Article Type: paper
Copyright Information: © 2020 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2020-03-26
Date Accepted: 2020-04-02
Online publication date: 2020-06-11