Frühauf, J https://orcid.org/0000-0002-6059-9807
Hüser, D https://orcid.org/0000-0002-2208-4490
Gärtner, E
Felgner, A https://orcid.org/0000-0002-7851-2220
Journal title: Surface Topography: Metrology and Properties
Article type: paper
Article title: Development of Si-chips with anisotropic rough surface
Copyright information: © 2020 IOP Publishing Ltd
Publication dates
Date received: 2020-04-24
Date accepted: 2020-09-03
Online publication date: 2020-09-14