Dai, Gaoliang https://orcid.org/0000-0002-1611-0074
Hu, Xiukun
Degenhardt, Johannes https://orcid.org/0000-0001-5508-5556
Article Title: Bottom-up approach for traceable calibration of tip geometry of stylus profilometer
Journal Title: Surface Topography: Metrology and Properties
Article Type: paper
Copyright Information: © 2022 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-11-02
Date Accepted: 2022-01-26
Online publication date: 2022-02-08