Nguyen, Linh Thi Phuong https://orcid.org/0000-0003-1594-4007
Liu, Bernard Haochih https://orcid.org/0000-0002-5914-5461
Funding for this research was provided by:
Ministry of Science and Technology, Taiwan (MOST 106-2628-E-006-001-MY3)
Article Title: Emerging machine learning strategies for diminishing measurement uncertainty in SPM nanometrology
Journal Title: Surface Topography: Metrology and Properties
Article Type: paper
Copyright Information: © 2022 IOP Publishing Ltd
Publication dates
Date Received: 2022-05-25
Date Accepted: 2022-08-17
Online publication date: 2022-09-06