Groche, T https://orcid.org/0000-0001-5953-7660
Seewig, J https://orcid.org/0000-0002-1420-1597
Article Title: Robust surface profile envelope estimation using a beam-surface contact model
Journal Title: Surface Topography: Metrology and Properties
Article Type: paper
Copyright Information: © 2023 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2022-11-24
Date Accepted: 2023-02-01
Online publication date: 2023-02-09