Hüser, Dorothee https://orcid.org/0000-0002-2208-4490
Meeß, Rudolf https://orcid.org/0000-0002-9009-8034
Dai, Gaoliang https://orcid.org/0000-0002-1611-0074
Felgner, André https://orcid.org/0000-0002-7851-2220
Hahm, Kai https://orcid.org/0009-0005-2521-1597
Verhülsdonk, Stefan https://orcid.org/0009-0006-5159-8550
Feist, Carsten https://orcid.org/0009-0001-9489-293X
Article Title: Precision of diamond turning sinusoidal structures as measurement standards used to assess topography fidelity
Journal Title: Surface Topography: Metrology and Properties
Article Type: paper
Copyright Information: © 2024 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2023-11-23
Date Accepted: 2024-02-22
Online publication date: 2024-03-01