Künne, Marco https://orcid.org/0009-0004-1477-694X
Pahl, Tobias https://orcid.org/0000-0002-8610-8818
Ribotta, Luigi https://orcid.org/0000-0001-5334-5246
Giura, Andrea https://orcid.org/0009-0000-2761-641X
Zucco, Massimo https://orcid.org/0000-0002-3187-6852
Murataj, Irdi https://orcid.org/0000-0001-9529-7959
Ferrarese Lupi, Federico
Lehmann, Peter https://orcid.org/0000-0003-0051-5066
Funding for this research was provided by:
2EU Horizon 2020 (project TracOptic)
Deutsche Forschungsgemeinschaft (LE 992/14-3)
Article Title: Surface slope measurement of steep silicon V-grooves using high NA Linnik interferometry
Journal Title: Surface Topography: Metrology and Properties
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2024-08-28
Date Accepted: 2025-01-24
Online publication date: 2025-02-03