Lin, Jun https://orcid.org/0000-0002-6772-317X
Monaghan, Scott https://orcid.org/0000-0002-9006-9890
Sakhuja, Neha
Gity, Farzan https://orcid.org/0000-0003-3128-1426
Jha, Ravindra Kumar
Coleman, Emma M
Connolly, James
Cullen, Conor P
Walsh, Lee A https://orcid.org/0000-0002-6688-8626
Mannarino, Teresa
Schmidt, Michael
Sheehan, Brendan
Duesberg, Georg S
McEvoy, Niall https://orcid.org/0000-0001-5950-8755
Bhat, Navakanta
Hurley, Paul K
Povey, Ian M https://orcid.org/0000-0002-7877-6664
Bhattacharjee, Shubhadeep
Funding for this research was provided by:
Indian Institute of Science ((IISc), National Nano Fabrication Facility, Centre for Nano Science and Enginee)
Ministry of Human Resource Development (Dept. of Electronics and Info. Tech, India, Dept. of Sci. and Technology’, India, Nanoelec. Net. for Res, and Appl. (NNetRA))
Science Foundation Ireland (AMBER (12/RC/2278), ATOM2 (SFI-TP32AMBER-ATOM2), INVEST (SFI-15/IA/3131))
H2020 Future and Emerging Technologies (QUEFORMAL (Grant Agreement No. 8290)
H2020 Marie Skłodowska-Curie Actions (Grant Agreement No. 713567)
Science and Engineering Research Board (Indian National Academy of Engineer, Tech. Innovation Nat. Fellowship of)
Journal title: 2D Materials
Article type: paper
Article title: Large-area growth of MoS2 at temperatures compatible with integrating back-end-of-line functionality
Copyright information: © 2020 IOP Publishing Ltd
Publication dates
Date received: 2020-07-26
Date accepted: 2020-10-23
Online publication date: 2020-12-24