Lin, Guan-Wei
Jiang, Yu-Hao
Kao, Peng-Kai
Chiu, I-Chung
Wu, Yu-Han
Hsu, Cheng-Che
Cheng, I-Chun
Chen, Jian-Zhang
Funding for this research was provided by:
Ministry of Science and Technology, Taiwan (MOST 100-2221-E-002-151-MY3, MOST 101-2628-E-002-020-MY3, MOST 102-2221-E-002-060, MOST 103-2221-E-002-057, MOST 103-2918-I-002-004, MOST 103-2918-I-002-005)
Journal title: Materials Research Express
Article type: paper
Article title: Oxidation of sputtered metallic Sn thin films using N2atmospheric pressure plasma jets
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-10-29
Date accepted: 2014-12-01
Online publication date: 2015-01-02