Browning, Robert
Padigi, Prasanna
Solanki, Raj
Tweet, Douglas J
Schuele, Paul
Evans, David
Journal title: Materials Research Express
Article type: paper
Article title: Atomic layer deposition of MoS2 thin films
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-12-30
Date accepted: 2015-02-06
Online publication date: 2015-02-26