Tokas, R B
Jena, S
Sarkar, P
Polaki, S R
Thakur, S
Basu, S
Sahoo, N K
Journal title: Materials Research Express
Article type: paper
Article title: Oblique angle deposition of HfO2thin films: quantitative assessment of indentation modulus and micro structural properties
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-09-08
Date accepted: 2015-02-03
Online publication date: 2015-03-03