Fan, Xiaojiao
Liu, Hongxia
Zhong, Bo
Fei, Chenxi
Wang, Xing
Wang, Qianqiong
Funding for this research was provided by:
Specialized Research Fund for the Doctoral Program of High Education (20130203130002)
National Natural Science Foundation of China (61376099, 11235008)
Journal title: Materials Research Express
Article type: paper
Article title: Effect of Al addition in HfO2 on the optical properties of the dielectrics using spectroscopy ellipsometry
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-01-12
Date accepted: 2015-03-05
Online publication date: 2015-03-31