Weng, Binbin
Wang, Jingyu
Larson, Preston
Liu, Yingtao
Journal title: Materials Research Express
Article type: paper
Article title: Growth process optimization of ZnO thin film using atomic layer deposition
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-10-24
Date accepted: 2016-11-29
Online publication date: 2016-12-12