García-Hernansanz, R
García-Hemme, E
Montero, D
Olea, J
Andrés, E San
del Prado, A
Ferrer, F J
Mártil, I
González-Díaz, G
Funding for this research was provided by:
Comunidad de Madrid (2013/MAE-2780)
Ministerio de Economía y Competitividad (BES-2014-067585, TEC 2013-41730-R)
Universidad Complutense de Madrid (910173-2014)
Journal title: Materials Research Express
Article type: paper
Article title: Limitations of high pressure sputtering for amorphous silicon deposition
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-12-02
Date accepted: 2016-02-18
Online publication date: 2016-03-07