Pereyaslavtsev, A https://orcid.org/0000-0001-6983-7077
Sokolov, I
Journal title: Materials Research Express
Article type: paper
Article title: Growth kinetics and complex characterization of PECVD SiOxNydielectric films
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-01-20
Date accepted: 2016-04-27
Online publication date: 2016-05-13