Jia, Yabin
Gao, Huifang
Li, Xu
Yao, Yaxuan
Wang, Meiling
Tao, Xingfu
Tian, Rongrong
Ren, Lingling
Qin, Lin
Journal title: Materials Research Express
Article type: paper
Article title: The thickness measurement of ultrathin films from new high-kmaterial HfO2by grazing incidence x-ray reflectivity
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-01-21
Date accepted: 2016-05-23
Online publication date: 2016-06-17