Wang, Min
Zhang, Yulian
Lu, Linfeng
Li, Dongdong
Zhu, Xufei
Funding for this research was provided by:
The Youth Innovation Fund for Interdisciplinary Research of SARI (Y426475234)
The Youth Innovation Promotion Association, Chinese Academy of Sciences (2013302)
Science & Technology Commission of Shanghai Municipality (14JC1492900)
National Natural Science Foundation of China (61474128, 61504155)
Journal title: Materials Research Express
Article type: paper
Article title: Thin crystalline silicon with double-sided nano-hole array fabricated by soft UV-NIL and RIE
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-02-28
Date accepted: 2017-04-13
Online publication date: 2017-05-04