Zhu, Xianglong
Chen, Xiuyi
Liu, Haijun
Kang, Renke
Zhang, Bi
Dong, Zhigang
Funding for this research was provided by:
Science Fund for Creative Research Groups of NSFC (51621064)
National Natural Science Foundation of China (51575084, 91323302)
Journal title: Materials Research Express
Article type: paper
Article title: An empirical equation for prediction of silicon wafer deformation
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-01-23
Date accepted: 2017-05-09
Online publication date: 2017-06-14