Borgardt, Nikolay I
Rumyantsev, Alexander V https://orcid.org/0000-0002-4966-0486
Volkov, Roman L
Chaplygin, Yuri A
Journal title: Materials Research Express
Article type: paper
Article title: Sputtering of redeposited material in focused ion beam silicon processing
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-01-10
Date accepted: 2018-02-05
Online publication date: 2018-02-21