Akshara, Poreddy Chaitanya https://orcid.org/0000-0001-7112-8050
Rajaram, Guruswamy
Krishna, M Ghanashyam https://orcid.org/0000-0002-9304-8243
Journal title: Materials Research Express
Article type: paper
Article title: Single composite target magnetron sputter deposition of crystalline and amorphous SiC thin films
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-02-04
Date accepted: 2018-03-02
Online publication date: 2018-03-16