Wang, Lanruo https://orcid.org/0000-0002-6984-8013
Zhong, Yuan
Li, Jinjin
Cao, Wenhui
Zhong, Qing
Wang, Xueshen
Li, Xu
Funding for this research was provided by:
National Natural Science Foundation Program (No. 61701470)
National Key R&D Program of China (No. 2016YFF0200402)
Journal title: Materials Research Express
Article type: paper
Article title: Effect of residual gas on structural, electrical and mechanical properties of niobium films deposited by magnetron sputtering deposition
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-02-16
Date accepted: 2018-03-22
Online publication date: 2018-04-18