Yao, W Z https://orcid.org/0000-0001-7722-8255
Roqueta, F
Craveur, J C
Belhenini, S
Gardes, P
Tougui, A
Funding for this research was provided by:
French National Association of Research and Technology (ANRT)
STMicroelectronics
Journal title: Materials Research Express
Article type: paper
Article title: Modelling and analysis of the stress distribution in a multi-thin film system Pt/USG/Si
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-02-01
Date accepted: 2018-03-28
Online publication date: 2018-04-11