Rontu, Ville https://orcid.org/0000-0001-8930-5836
Nolvi, Anton
Hokkanen, Ari
Haeggström, Edward
Kassamakov, Ivan
Franssila, Sami
Funding for this research was provided by:
Tekes (Superwindows)
Suomen Kulttuurirahasto
Journal title: Materials Research Express
Article type: paper
Article title: Elastic and fracture properties of free-standing amorphous ALD Al2O3thin films measured with bulge test
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-01-11
Date accepted: 2018-04-05
Online publication date: 2018-04-20