Shariar, Kazy F https://orcid.org/0000-0002-3018-3907
Zhang, Jie
Coasey, Keith
Sufian, Md Abu
Remy, Roddell
Qu, Jing
Mackay, Michael
Zeng, Yuping
Journal title: Materials Research Express
Article type: paper
Article title: The effects of ICP dry etching and HF wet etching on the morphology of SiO2 surface
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-05-11
Date accepted: 2018-07-24
Online publication date: 2018-08-08