Cantas, Ayten https://orcid.org/0000-0002-6536-5516
Ozyuzer, Lutfi
Aygun, Gulnur https://orcid.org/0000-0003-0860-2914
Journal title: Materials Research Express
Article type: paper
Article title: Comparision of in situ spectroscopic ellipsometer and ex situ x-ray photoelectron spectroscopy depth profiling analysis of HfO2/Hf/Si multilayer structure
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-02-26
Date accepted: 2018-08-06
Online publication date: 2018-08-17