Chauhan, Sachin S
Sharma, Uttam https://orcid.org/0000-0003-1807-1993
Sharma, Jayshree
Sanyasi, A K https://orcid.org/0000-0002-5454-9053
Ghosh, J
Yadava, Nandini
Choudhary, K K https://orcid.org/0000-0001-5783-3298
Ghosh, S K
Journal title: Materials Research Express
Article type: paper
Article title: Development of RF based capacitively coupled plasma system for tungsten nano layer deposition on graphite
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-06-27
Date accepted: 2018-08-29
Online publication date: 2018-09-12